In a high vacuum environment, the electron gun filament is heated and emits thermal electrons. The thermal electrons are accelerated by the electric field and gain great kinetic energy. Under the constraint of permanent magnets or electromagnets, they are deflected to the surface of the evaporation source, bombarding the material and vaporizing it, thereby achieving the purpose of evaporation.
Support
The chamber supports heating and oxygen flow during evaporation.
Technical Indicators
Currently available depositable materials include
SiO2、ITO、TiO2；
Power
Evaporation rate 0.5A/s-5A/s, evaporation power 0-40%;
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