CN
苏州美芝恩电子科技有限公司
CN
苏州美芝恩电子科技有限公司
Home > Laboratory Equipment > Micro-nano Manufacturing > Vacuum Coating >
Vacuum Coating
Vacuum Metal Coating
Contact Us
15050455470

Use

Typical Applications

It is used to evaporate common metals such as Ti, Al, Ni, Cr and precious metals such as Pt and Au. The maximum evaporation thickness of some metals can reach 1000nm.

Principle

In a high vacuum environment, the electron gun filament is heated and emits thermal electrons. The thermal electrons are accelerated by the electric field and gain great kinetic energy. Under the constraint of permanent magnets or electromagnets, they are deflected to the surface of the evaporation source, bombarding the material and vaporizing it, thereby achieving the purpose of evaporation.

Support

2, 4, 6, 8 inch wafers. Up to 74 2-inch wafers, 24 4-inch wafers, 8 6-inch wafers, and 4 8-inch wafers can be evaporated at one time. The sample size is downward compatible, and the film non-uniformity is ≤±3%.

Technical Indicators

  • Power

    Evaporation rate 0.01nm/s-2nm/s, pre-evaporation power 10%-45%, evaporation power 0-60%;

  • Evaporation thickness

    Ordinary metals (Ni, Al, Ti) 5nm-2000nm;

  • Working vacuum

    5E-4Pa；

  • Temperature

    20-300℃。

Copyright © Suzhou Meizhien Electronic Technology Co., Ltd. All rights reserved Website Design