CN
苏州美芝恩电子科技有限公司
CN
苏州美芝恩电子科技有限公司
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Structural Inspection
3D Profiler
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Use

Typical Applications

It can be used for MEMS characterization, thick film, optical elements, semiconductor device surface morphology, roughness data measurement and analysis of machined parts, and surface quality and defect detection.

Principle

Using a differential interference microscope in which the interference phase difference is linearly related to the azimuth angle of the analyzer, phase shift interferometry technology is applied to achieve fast, highly repeatable and high-resolution measurement of surface profiles.

Technical Indicators

  • Vertical measuring range

    0.1mm-1mm；

  • Vertical resolution

    ＜0.1nm；

  • Horizontal resolution

    13.1μm；

  • Field of view

    0.05-8.45mm；

  • Measurement Mode

    PSI-suitable for measuring structures with a roughness less than 160nm; VSI-suitable for measuring structures with a roughness less than 1mm.

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